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SEMICONDUCTOR TUTORIALS AND ARTICLES - MEMS

 

MEMS Fabrication Techniques

 

Nice basic tutorial.

Beginners Guide to MEMS

 

More detailed processing and equipment descriptions than above link.

 

 

 

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IC Microanalysis LLC - 17631 North 6th Street  - Phoenix, AZ  85022  -  Phone: 602-828-2606  -  Fax: 602-324-0826

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