SEMICONDUCTOR TUTORIALS AND ARTICLES - PHOTOLITHOGRAPHY

 

Photolithography Alignment Tutorial

 

The purpose of this tutorial is to give some guidance to new contact aligner users on how actual alignment between a wafer and a photomask should be done.

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Semiconductor Mask Tutorial (pdf)

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Photolithography Tutorial

 

Nice article describing the processes using Tokyo Electron systems.

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Photolithography Tutorial 2

 

Much more detailed explanation of the processes involved.