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SEMICONDUCTOR TUTORIALS AND ARTICLES - MEMS

 

MEMS Fabrication Techniques

 

Nice basic tutorial.


Beginners Guide to MEMS

 

More detailed processing and equipment descriptions than above link.


Mems: Introduction And Fundamentals

The Mems Handbook

Click on images for more information on these books.

 

 

IC Microanalysis LLC - 17631 North 6th Street  - Phoenix, AZ  85022 -  Phone: 602-828-2606

Email: info@icmicroanalysis.com

 

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