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Photolithography Alignment Tutorial
The purpose of this tutorial is to give some guidance to new contact aligner users on how actual alignment between a wafer and a photomask should be done. Semiconductor Mask Tutorial (pdf)
Nice article describing the processes using Tokyo Electron systems.
Much more detailed explanation of the processes involved.
Click on images for more information on these text books.
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Magazines
CPU Computer Power User Magazine
Solid State Technology Magazine
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IC Microanalysis LLC - 17631 North 6th Street - Phoenix, AZ 85022 - Phone: 602-828-2606 Email: info@icmicroanalysis.com
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